in HIS-LSF
Lecture Content:
- Measurement method for determining the macro and micro geometry of small components
- optical microsensors
- Radiation and wave optics basics
- interferometric measuring methods
- Interference microscopy (coherent and white light)
- confocal microscopy
- Triangulation method
- microscopic fringe projection
- Reflection and autofocus sensors
- fiber optic sensors
- chromatic sensors
- Applications