InstituteEquipment
Production Measurement and Testing Technology

Production Measurement and Testing Technology

  • Confocal White Light Microscope (NanoFocus µsurf)

    Technical Specifications:

    • Optical 3D measuring device
    • Light source: 100W Xenon cold light source
    • CCD camera: 1024x1024 pixels
    • Lateral measuring range: 100x100mm (stepper motor)
    • Vertical measuring range: 350 µm (piezo drive)
    • Optics modules
      • Objective: 10x / 20x / 50x / 100x
      • Numerical aperture: 0.3 / 0.46 / 0.8 / 0.95
      • Measuring field: 1600x1600 µm / 800x800 µm / 320x320 µm / 160x160 µm
      • Working distance: 10.1mm / 3.1mm / 0.66mm / 0.31mm
      • max.inclination angle: 8.7 ° / 13.7 ° / 26.6 ° / 35.9 °
      • Vertical resolution: 20nm / 5nm / 2nm / 1nm

    Application Areas:

    • Measurement of the surface topographies
    • Characterization of the surface roughness
  • Confocal Laser Scanning Microscope (Keyence VK-X200)

    Technical Specifications:

    • Optical 3D measuring device
    • Light source: Class 2 laser, 408 nm, 0.95mW
    • Scanning mirror + Photo Multiplier Tube: 1024x768 pixels
    • Lateral measuring range: 100x100mm (stepper motor)
    • Vertical measuring range: 7mm (piezo drive)
    • Optics modules 
      • Objective: 10x / 20x / 50x / 150x
      • Numerical aperture: 0.3 / 0.46 / 0.95 / 0.95
      • Measuring field: 1.35x1.01mm / 0.68x0.51mm / 0.27x0.20mm / 0.09x0.07mm
      • Working distance: 16.5mm / 3.1mm / 0.35mm / 0.2mm

    Application Areas:

    • Measurement of the surface topographies
    • Characterization of the surface roughness
    • Measurement of film thickness

Team Leader

PD Dr.-Ing. Dipl.-Phys. Markus Kästner
Group Leader
Production Metrology
Address
An der Universität 1
30823 Garbsen
Building
Room
114
PD Dr.-Ing. Dipl.-Phys. Markus Kästner
Group Leader
Production Metrology
Address
An der Universität 1
30823 Garbsen
Building
Room
114