Production Measurement and Testing Technology
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Confocal White Light Microscope (NanoFocus µsurf)
Technical Specifications:
- Optical 3D measuring device
- Light source: 100W Xenon cold light source
- CCD camera: 1024x1024 pixels
- Lateral measuring range: 100x100mm (stepper motor)
- Vertical measuring range: 350 µm (piezo drive)
- Optics modules
- Objective: 10x / 20x / 50x / 100x
- Numerical aperture: 0.3 / 0.46 / 0.8 / 0.95
- Measuring field: 1600x1600 µm / 800x800 µm / 320x320 µm / 160x160 µm
- Working distance: 10.1mm / 3.1mm / 0.66mm / 0.31mm
- max.inclination angle: 8.7 ° / 13.7 ° / 26.6 ° / 35.9 °
- Vertical resolution: 20nm / 5nm / 2nm / 1nm
Application Areas:
- Measurement of the surface topographies
- Characterization of the surface roughness
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Confocal Laser Scanning Microscope (Keyence VK-X200)
Technical Specifications:
- Optical 3D measuring device
- Light source: Class 2 laser, 408 nm, 0.95mW
- Scanning mirror + Photo Multiplier Tube: 1024x768 pixels
- Lateral measuring range: 100x100mm (stepper motor)
- Vertical measuring range: 7mm (piezo drive)
- Optics modules
- Objective: 10x / 20x / 50x / 150x
- Numerical aperture: 0.3 / 0.46 / 0.95 / 0.95
- Measuring field: 1.35x1.01mm / 0.68x0.51mm / 0.27x0.20mm / 0.09x0.07mm
- Working distance: 16.5mm / 3.1mm / 0.35mm / 0.2mm
Application Areas:
- Measurement of the surface topographies
- Characterization of the surface roughness
- Measurement of film thickness
Team Leader
PD Dr.-Ing. Dipl.-Phys. Markus Kästner
Group Leader
Production Metrology
Production Metrology
Phone
Address
An der Universität 1
30823 Garbsen
30823 Garbsen
Building
Room
PD Dr.-Ing. Dipl.-Phys. Markus Kästner
Group Leader
Production Metrology
Production Metrology
Phone