Production Metrology
Head of Team: Dr.-Ing. Dipl.-Phys. Markus Kästner

White-light Confocal Microscop (NanoFocus µsurf)


Technical Details:
- Optical 3D Measurement
- Light source: 100W Xenon cold-light
- CCD Camera: 1024x1024 Pixel
- Lateral Measuring range: 100x100mm (step motor)
- Vertical Measuring range : 350µm (Piezo motor)
- Optic modules
- Objective lenses: 10x / 20x / 50x / 100x
- Numerical Aperture: 0.3 / 0.46 / 0.8 / 0.95
- Field of measurement: 1600x1600µm / 800x800µm / 320x320µm / 160x160µm
- Working distance: 10.1mm / 3.1mm / 0.66mm / 0.31mm
- max. inclination: 8.7° / 13.7° / 26.6° / 35.9°
- Vertical resolution: 20nm / 5nm / 2nm / 1nm
Areas of Application :
- Surface topographical Measurement
- Characterisation of surface roughness
Usage in Current Research Projects:
- EC-Project WEMESURF
- AiF-Project Stochastische Strukturen
- DFG-Project Data fusion of areal measured microtopographies with plane of reference using optical sensors
- EU-Project Clean Sky
Confocal Laser Scanning Microscope (Keyence VK-X200)

Technical Details:
- Optical 3D-Microscope
- Lightsource: Class 2 Laser, 408 nm, 0.95mW
- Scanningmirror + Photo Multiplier Tube : 1024x768 Pixel
- Lateral Measurement Range: 100x100mm (Precise pole screw)
- Vertical Measurement Range: 7mm (Piezo)
- Optics Modules
- objektive lenses: 10x / 20x / 50x / 150x
- numerical aperture: 0.3 / 0.46 / 0.95 / 0.95
- field of measurement: 1.35x1.01mm / 0.68x0.51mm / 0.27x0.20mm / 0.09x0.07mm
- working distance: 16.5mm / 3.1mm / 0.35mm / 0.2mm
Anwendungsgebiete:
- Measurement of surface topographies
- Characteriszation of surface roughness
- Thickness measurement of transparent materials
Mitarbeit an folgenden Forschungsprojekten:
White-light Interferometer (Veeco Wyko NT1100)

Specifications:
- Optical 3D measurement
- Light source: Halogen lamp
- CCD camera: 736 x 480 Pixel
- Lateral Measuring range: 100mm x 100mm (step motor)
- Vertical Measuring range: 1mm (piezo motor)
- Vertical resolution: <0.1nm
- Repeatability (RMS): 0.01 nm
- Additional magnification: 0.5x und 1x Tubuslinse
- Evaluation modules:
- VSI - Vertical Scanning Interferometer
- PSI - Phase Shifting Interferometer
- EVSI - Enhanced Vertical Scanning Interferometer
- Optic modules
- Objektive: 5x / 20x / 50x
- Numerical aperture: 0.13 / 0.4 / 0.55
- max. measurable angle: 5.6° / 17.7° / 25°
- Working distance: 9.3mm / 4.7mm / 3.4mm
- Measuring field (0.5x Tube lens): 2.47x1.88mm / 0.62x0.47mm / 0.25x0.19mm
Application areas:
- Surface topographical measurment
- Characterisetion of the surface roughness
Application in the following research projects:
High precision form measuring system Mahr MFU7


Technical Details:
- Rotation Speed: 1,7 - 5,0 - 10,0 U/min
- Checking diameter: 110 mm
- High Precision-Air bearing:
- Concentricity: 0,07 µm + 0,0008 µm / mm Measurement level
- Directness Z-Axis(vertical): 0,4 µm / 100 mm; 0,8 µm / 500 mm
- Directness R-Axis(horizontal): 0,4 µm / 100 mm
- Rotary encoder ERO 815: 36.000 Lines/Circumference(physical)
- Dimensions: (L x B x H) 1200 mm x 620 mm x 1640 mm
- Placement: Conditioned Measuring Cabine(20 °C ± 0,5 °C)
Areas of Application:
- Concentricity measurement
- Gearwheel measurement
- Gearshaft measurement
Usage in Current Research Projects:
- SFB 489, Teilprojekt T4: Adaptronic Precision Positioning
- SFB 489, Teilprojekt A5: Allowance-oriented Fine Positioning
Optical-tactile Coordinate Measurement System - Werth VCIP 3D


Technical Details:
- Multisensor coordinate measurement system in fixed portal
- Measurement volume: 1000mm x 1000mm x 600mm
- Exisiting sensors: taktile sensor, video sensor and a autofocus sensor
- Measurement uncertainty (length): 1,4 µm +[L/100]
- Software: WinWerth Software
- Control of temperature: 20°C +- 0,5°C
Areas of Application:
- Measurements of dimension, form and position of complex components
- Contour-Scanning
Usage in Current Research Projects:
- CRC 489 - Process chain for the Production of Precision Forged High-Performance Components
- Subproject B5: Geometric Analysis
Multi sensor measuring maschine Mahr OMS553HA


Technical Details:
- multi sensor coordinate measuring machine with fixed portal and movable measuring table
- integrated sensors:
- optoelectronic 2-step zoom with two fixed focal length
- reflected and transmitted light measurements due to transparent measuring table
- laser sensor for static and dynamic measuring
- switching and scanning probes for tactile reference measurements
- white light interferometer
- chromatic sensor
- scattered light sensor
- optoelectronic 2-step zoom with two fixed focal length
- incremental length measuring system of the axis with a resolution < 0,1 µm
- length measurement uncertainty E1 = (0,5 + L/900) μm
- axis of rotation with axial run-out < 0,065 μm and concentricity < 0,071 μm
- measuring volume: 500mm x 500mm x 300mm
- maximal load of measuring table: 50 kg
Areas of Application:
- measurement of dimension, form and position of workparts with standard forms using different sensors simultaneously
- measurement of roughness using the white light interferomter and the chromatic sensor
Usage in Current Research Projects:
- Structure Oriented Surface Characterisation Based on Optical Measurement Techniques
- Stochastic Structures
T8000: mechanical contour scanner


Technical Details:
- different scanners can be integrated
- contour scanner: acquisition of the workpiece contour
- roughness scanner:: acquisition of the surface roughness
- admissible temperature range: +10°C bis +40°C
- relative atmospheric humidity: max 85%
- the workpieces should have room temperature
- the following surface parameters are measurabl:
- DIN EN ISO 4287: roughness parameter (Ra, Rz, Rmax, Rt, Rq), profile parameter, waviness parameter
- DIN EN ISO 13565: roughness parameters (Rk, Rpk, Rvk)
- measurement range / resolution (depending on the used scanner):
- +/- 8 µm / 1nm
- +/- 80 µm / 10 nm
- +/- 800 µm / 100 nm
- +/- 8000 µm / 1000 nm
- keying speed vt: 0.01mm/s - 2.0 mm/s (variable in steps from 0.01 mm/s)
Areas of Application:
- contour measurement
- roughness measurement
Usage in Current Research Projects:
- Asphero 5 (finished): commercial production from ultra precise aspheric lenses
Perthometer Concept (Mahr)

Technical Details:
- Tactile measurement system
- Styli with radii in between 3 and 5 µm
- Vertical measurement range between 250 and 2500 µm
- Lateral measurement range (5 per measurement): 0.08 mm up to 8mm
- Measurement velocity between 0.1 and 0.5 mm/s
- Lateral resolution: 5 to 0.5 µm
Application:
- Surface roughness characterization as per DIN EN ISO 4287
Surfscan Somicronic

Technical Details:
- Areal tactile measurement system
- Styli (tip radius / angle):
- 10.35 µm / 60° (ST088)
- 2.8 µm / 90° (ST188)
- 10.35 µm / 60° (ST088)
- Lateral measurement range: up to 1 cm²
- Measurement velocity between 0.3 mm/s
- Lateral resolution: 32 to 0.5 µm
Application:
- Areal surface roughness characterization as per DIN EN ISO 4771, 4287-1996, 13565 and 12085
Production Measurement Lab


Fringe Projection System for the Measurement of Gearwheels
Technical Data:
- Fringe Projection System (GFMesstechnik GmbH)
- Triangulation method for detection of geometric values
- Bright DMD-Projector
- Light source: White Light
- 2*10^6 Measurement Points in 6 seconds
- Measurement volume: 45 mm x 35 mm x 18 mm
- Resolution:
- vertical: 4 µm
- lateral: 30 µm
- Measurement deviation: < 6 µm with K = 2
Areas of Appplication:
- Measurement of spur- and helical-thooted gearwheel with an additional rotational axis and a vertical axis
Usage in Currrent Research Projects:
Cooridinate Measuring Machine (Zeiss ZMC 550)


Technical Details:
- The portal device has a fixed device table and a laterally driven portal
- The measurement volume is 550mm x 500mm x 450mm
- It is inductively measured, so that single and continuous measuring point admission is possible
- The length measuring uncertainty amounts to: 1,5µ+l/250
- Software used: UMESS 300 (Standard form elements) / KUM (Curve + curved surfaces) / GON (Gear wheel measurement) / own software development
- the precision top plate is used as the 4th axle
Areas of application:
- Measurement of dimensions, shape and position of workpieces with the standard form elements
- Profile measurements by single-point or scanning
- Measurement and deviation analysis at teeth geometry
Cooperation in the following projects:
- SFB 300 - Tools and tool systems of metalworking
- Subproject: Coordinate measuring technique for the appraisal of quality of forgings and - tools
- DFG: Precision shaping of diagonally-interlocked spur wheels
- Subproject: gearing measurement
Shaft Measurement System AMV923V with Multisensor Technique


Technical Details:
- Optical shaft measurement system AMV923V based on shadow projection (Hommel-Etamic GmbH)
- Light source: 5 Infrared LEDs
- CCD-camera: 5 line scanning cameras
- Measurement capacities:
- Diameter: 0.2-230 mm
- Length: 900 mm
- Resolution:
- Diameter / Length : 0.5 µm
- Rotation: 0.018°
- Accuracy:
- Diameter: ±(2 + D[mm]/100) µm
- Length: ±(5 + L[mm]/100) µm
- Additional sensors can be used by positioning with a 3-axis positioning system (Newport Ltd.):
- Conoscopic sensor (Optimet Ltd.)
- Fringe projection system (GFMesstechnik GmbH)
Areas of Appplication:
- Measurements of crank shafts or other rotation-symmetric components with shadow projection system
- Measurements of complex geometries with additional sensors
Usage in Currrent Research Projects:
- CRC 489 - Process chain for the Production of Precision Forged High-Performance Components
- Subproject A5: Material Allowance Based Finepositioning
- Subproject B5: Geometric Analysis
Endoscopic Fringeprojection

Technical Details:
- Texas Instruments DLP 1024x786
- Laser Light Source
- Fiberscopic Image Guide
- Gradient Index-Optics
- High Measurement Speed
- Inverse Fringeprojection Approach
Anwendungsgebiet:
- Measurment of filigree sideformelements on internal carriergeometries
Mitarbeit an folgenden Projekten:
40-channel measurement amplifier for force measurement

Technical Details:
- AC amplifier for strain gauge full bridges, inductive half and full bridges
- signal processing for sensor signals
- galvanically isolated inputs
- bridge supply voltage (+ / - 5V)
- 1000Hz carrier frequency supply voltage
- up to 40 measurement channels
Areas of Application:
- force measurement for strain gauge bridges
Cooperation in the following projects:
Multi-Scale Geometry Measurement

Technical Data:
- Sensors
- µCad Premium Fringe-Projection-Sensor
- Resolution: 8x8x0,3 µm
- Measurement Volume: 12x9x3 mm
- Duration: 6s
- Camera
- 1238 x 1034 px
- Lens: telecentric 0,375x
- µCad Premium Fringe-Projection-Sensor
- Reference
- Lasertracker: Leica AT901-B
- Measurement Volume: up to 80 m radius
- Accuracy: 10µm + 5µm/m
- Lasertracker: Leica AT901-B
- Actors
- Stäubli TX90
- 6-Axis Anthropomorph
- Reach: 1m
- Traglast: 14kg (20kg)
- Repeatability +-3 µm
- Rotary Stage
- Newport URS150
- Repeatability: 0,01°
- Stäubli TX90
Area of Application:
- Measurement of used turbine blades
Cooperation:
- SFB 871 Product Regeneration