Logo Leibniz Universität Hannover
Institute of Measurement
and Automatic Control
Logo Leibniz Universität Hannover
Institute of Measurement
and Automatic Control
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Production Metrology

Head of Team:  Dr.-Ing. Dipl.-Phys. Markus Kästner

White-light Confocal Microscop (NanoFocus µsurf)

Technical Details:

  • Optical 3D Measurement
  • Light source: 100W Xenon cold-light
  • CCD Camera: 1024x1024 Pixel
  • Lateral Measuring range: 100x100mm (step motor)
  • Vertical Measuring range : 350µm (Piezo motor)
  • Optic modules

    • Objective lenses: 10x / 20x / 50x / 100x
    • Numerical Aperture: 0.3 / 0.46 / 0.8 / 0.95
    • Field of measurement: 1600x1600µm / 800x800µm / 320x320µm / 160x160µm
    • Working distance: 10.1mm / 3.1mm / 0.66mm / 0.31mm
    • max. inclination: 8.7° / 13.7° / 26.6° / 35.9°
    • Vertical resolution: 20nm / 5nm / 2nm / 1nm

Areas of Application :

  • Surface topographical Measurement
  • Characterisation of surface roughness

Usage in Current Research Projects:

Confocal Laser Scanning Microscope (Keyence VK-X200)

Technical Details:

  • Optical 3D-Microscope
  • Lightsource: Class 2 Laser, 408 nm, 0.95mW
  • Scanningmirror + Photo Multiplier Tube : 1024x768 Pixel
  • Lateral Measurement Range: 100x100mm (Precise pole screw)
  • Vertical Measurement Range: 7mm (Piezo)
  • Optics Modules

    • objektive lenses: 10x / 20x / 50x / 150x
    • numerical aperture: 0.3 / 0.46 / 0.95 / 0.95
    • field of measurement: 1.35x1.01mm / 0.68x0.51mm / 0.27x0.20mm / 0.09x0.07mm
    • working distance: 16.5mm / 3.1mm / 0.35mm / 0.2mm

Anwendungsgebiete:

  • Measurement of surface topographies
  • Characteriszation of surface roughness
  • Thickness measurement of transparent materials

Mitarbeit an folgenden Forschungsprojekten:

White-light Interferometer (Veeco Wyko NT1100)

Specifications:

  • Optical 3D measurement
  • Light source: Halogen lamp
  • CCD camera: 736 x 480 Pixel
  • Lateral Measuring range: 100mm x 100mm (step motor)
  • Vertical Measuring range: 1mm (piezo motor)
  • Vertical resolution: <0.1nm
  • Repeatability (RMS): 0.01 nm
  • Additional magnification: 0.5x und 1x Tubuslinse
  • Evaluation modules:

    • VSI   - Vertical Scanning Interferometer
    • PSI   - Phase Shifting Interferometer
    • EVSI - Enhanced Vertical Scanning Interferometer

  • Optic modules

    • Objektive: 5x / 20x / 50x
    • Numerical aperture: 0.13 / 0.4 / 0.55
    • max. measurable angle: 5.6° / 17.7° / 25°
    • Working distance: 9.3mm / 4.7mm / 3.4mm
    • Measuring field (0.5x Tube lens): 2.47x1.88mm / 0.62x0.47mm / 0.25x0.19mm

Application areas:

  • Surface topographical measurment
  • Characterisetion of the surface roughness

Application in the following research projects:

High precision form measuring system Mahr MFU7

Technical Details:

  • Rotation Speed: 1,7 - 5,0 - 10,0 U/min
  • Checking diameter: 110 mm
  • High Precision-Air bearing:

    • Concentricity: 0,07 µm + 0,0008 µm / mm Measurement level
    • Directness Z-Axis(vertical): 0,4 µm / 100 mm;  0,8 µm / 500 mm
    • Directness R-Axis(horizontal): 0,4 µm / 100 mm

  • Rotary encoder ERO 815: 36.000 Lines/Circumference(physical)

  • Dimensions: (L x B x H) 1200 mm x 620 mm x 1640 mm
  • Placement: Conditioned Measuring Cabine(20 °C ± 0,5 °C)

Areas of Application:

  • Concentricity measurement
  • Gearwheel measurement
  • Gearshaft measurement


Usage in Current Research Projects:

Optical-tactile Coordinate Measurement System - Werth VCIP 3D

Technical Details:

  • Multisensor coordinate measurement system in fixed portal
  • Measurement volume: 1000mm x 1000mm x 600mm
  • Exisiting sensors: taktile sensor, video sensor and a autofocus sensor
  • Measurement uncertainty (length): 1,4 µm +[L/100]
  • Software: WinWerth Software
  • Control of temperature: 20°C +- 0,5°C

Areas of Application:

  • Measurements of dimension, form and position of complex components
  • Contour-Scanning

Usage in Current Research Projects:

  • CRC 489 - Process chain for the Production of Precision Forged High-Performance Components
  • Subproject B5: Geometric Analysis

Multi sensor measuring maschine Mahr OMS553HA

Technical Details:

      • multi sensor coordinate measuring machine with fixed portal and movable measuring table
      • integrated sensors:

        • optoelectronic 2-step zoom with two fixed focal length

          • reflected and transmitted light measurements due to transparent measuring table

        • laser sensor for static and dynamic measuring
        • switching and scanning probes for tactile reference measurements
        • white light interferometer
        • chromatic sensor
        • scattered light sensor

      • incremental length measuring system of the axis with a resolution < 0,1 µm
      • length measurement uncertainty E1 = (0,5 + L/900) μm
      • axis of rotation with axial run-out < 0,065 μm and concentricity < 0,071 μm
      • measuring volume: 500mm x 500mm x 300mm
      • maximal load of measuring table: 50 kg

      Areas of Application:

      • measurement of dimension, form and position of workparts with standard forms using different sensors simultaneously
      • measurement of roughness using the white light interferomter and the chromatic sensor

      Usage in Current Research Projects:

      T8000: mechanical contour scanner

      Technical Details:

      • different scanners can be integrated

        • contour scanner: acquisition of the workpiece contour
        • roughness scanner:: acquisition of the surface roughness

      • admissible temperature range: +10°C bis +40°C
      • relative atmospheric humidity: max 85%
      • the workpieces should have room temperature
      • the following surface parameters are measurabl:

        • DIN EN ISO 4287: roughness parameter (Ra, Rz, Rmax, Rt, Rq), profile parameter, waviness parameter
        • DIN EN ISO 13565: roughness parameters (Rk, Rpk, Rvk)

      • measurement range / resolution (depending on the used scanner):

        • +/- 8 µm / 1nm
        • +/- 80 µm / 10 nm
        • +/- 800 µm / 100 nm
        • +/- 8000 µm / 1000 nm

      • keying speed vt: 0.01mm/s - 2.0 mm/s (variable in steps from 0.01 mm/s)

      Areas of Application:

      • contour measurement
      • roughness measurement

      Usage in Current Research Projects:

      • Asphero 5 (finished): commercial production from ultra precise aspheric lenses

       

       

      Perthometer Concept (Mahr)

      Technical Details:

      • Tactile measurement system
      • Styli with radii in between 3 and 5 µm
      • Vertical measurement range between 250 and 2500 µm
      • Lateral measurement range (5 per measurement): 0.08 mm up to 8mm 
      • Measurement velocity between 0.1 and 0.5 mm/s
      • Lateral resolution:  5 to 0.5 µm

        Application:
      • Surface roughness characterization as per DIN EN ISO 4287

      Surfscan Somicronic

      Technical Details:

      • Areal tactile measurement system
      • Styli (tip radius / angle):

        • 10.35 µm / 60° (ST088)
        •    2.8   µm / 90° (ST188)

      • Lateral measurement range: up to 1 cm²
      • Measurement velocity between 0.3 mm/s
      • Lateral resolution:  32 to 0.5 µm

        Application:

      • Areal surface roughness characterization as per DIN EN ISO 4771, 4287-1996, 13565 and 12085

      Production Measurement Lab

      Fringe Projection System for the Measurement of Gearwheels

      Technical Data:

      • Fringe Projection System (GFMesstechnik GmbH)

        • Triangulation method for detection of geometric values
        • Bright DMD-Projector
        • Light source: White Light
        • 2*10^6 Measurement Points in 6 seconds
        • Measurement volume: 45 mm x 35 mm x 18 mm
        • Resolution:

          • vertical: 4 µm
          • lateral: 30 µm

        • Measurement deviation: < 6 µm with K = 2

      Areas of Appplication:

      • Measurement of spur- and helical-thooted gearwheel with an additional rotational axis and a vertical axis

      Usage in Currrent Research Projects:

      Cooridinate Measuring Machine (Zeiss ZMC 550)

      Technical Details:

      • The portal device has a fixed device table and a laterally driven portal
      • The measurement volume is 550mm x 500mm x 450mm
      • It is inductively measured, so that single and continuous measuring point admission is possible
      • The length measuring uncertainty amounts to: 1,5µ+l/250
      • Software used: UMESS 300 (Standard form elements) / KUM (Curve + curved surfaces) / GON (Gear wheel measurement) / own software development
      • the precision top plate is used as the 4th axle

      Areas of application:

      • Measurement of dimensions, shape and position of workpieces with the standard form elements
      • Profile measurements by single-point or scanning
      • Measurement and deviation analysis at teeth geometry

      Cooperation in the following projects:

      • SFB 300 - Tools and tool systems of metalworking

        • Subproject: Coordinate measuring technique for the appraisal of quality of forgings and - tools

      • DFG: Precision shaping of diagonally-interlocked spur wheels

        • Subproject: gearing measurement

      Shaft Measurement System AMV923V with Multisensor Technique

      Technical Details:

      • Optical shaft measurement system AMV923V based on shadow projection (Hommel-Etamic GmbH)
      • Light source:  5 Infrared LEDs
      • CCD-camera: 5 line scanning cameras
      • Measurement capacities:

        • Diameter: 0.2-230 mm
        • Length: 900 mm

      • Resolution:

        • Diameter / Length : 0.5 µm
        • Rotation: 0.018°

      • Accuracy:

        • Diameter: ±(2 + D[mm]/100) µm
        • Length: ±(5 + L[mm]/100) µm

      • Additional sensors can be used by positioning with a 3-axis positioning system (Newport Ltd.):

        • Conoscopic sensor (Optimet Ltd.)
        • Fringe projection system (GFMesstechnik GmbH)

      Areas of Appplication:

      • Measurements of crank shafts or other rotation-symmetric components with shadow projection system
      • Measurements of complex geometries with additional sensors

      Usage in Currrent Research Projects:

      Endoscopic Fringeprojection

      Technical Details: 

      • Texas Instruments DLP 1024x786
      • Laser Light Source
      • Fiberscopic Image Guide
      • Gradient Index-Optics
      • High Measurement Speed
      • Inverse Fringeprojection Approach

      Anwendungsgebiet: 

      • Measurment of filigree sideformelements on internal carriergeometries

      Mitarbeit an folgenden Projekten: 

      40-channel measurement amplifier for force measurement

      Technical Details:

      • AC amplifier for strain gauge full bridges, inductive half and full bridges
      • signal processing for sensor signals
      • galvanically isolated inputs
      • bridge supply voltage (+ / - 5V)
      • 1000Hz carrier frequency supply voltage
      • up to 40 measurement channels

      Areas of Application: 

      • force measurement for strain gauge bridges

      Cooperation in the following projects: 

      Multi-Scale Geometry Measurement

      Test Rig

      Technical Data:

      • Sensors

        • µCad Premium Fringe-Projection-Sensor

          • Resolution: 8x8x0,3 µm
          • Measurement Volume: 12x9x3 mm
          • Duration: 6s

        • Camera

          • 1238 x 1034 px
          • Lens: telecentric 0,375x

      • Reference

        • Lasertracker: Leica AT901-B

          • Measurement Volume: up to 80 m radius
          • Accuracy: 10µm + 5µm/m

      • Actors

        • Stäubli TX90

          • 6-Axis Anthropomorph 
          • Reach: 1m
          • Traglast: 14kg (20kg)
          • Repeatability +-3 µm

        • Rotary Stage

          • Newport URS150
          • Repeatability: 0,01°

      Area of Application:

      • Measurement of used turbine blades

      Cooperation:

      • SFB 871 Product Regeneration